行业应用

Vacuum Stage Examples

 
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UHV QNP-500L closed-loop piezo nanopositioner
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UHV (10-7 Torr) ADRS-100 direct-drive rotary stage with unlimited travel
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High-vacuum MPS75SL stage with 100 mm travel

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Custom low-vacuum (10-3 Torr) three-axis system with XY and Z articulation
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Low-vacuum (10-6 Torr) two-axis AOM130M AZ-EL gimbal with 590 mm clear aperture
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High-vacuum (10-6 Torr) three-axis (XYZ) system (ATS2000 stages) for in-vacuum testing of discrete parts
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High vacuum (10-6 Torr) four-axis (XYZθ) screw-driven system for ion-beam optics polishing
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High-vacuum (10-6 Torr) three-axis (XZθ) with ATS2000s and APR200 for synchrotron sample manipulation application
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Custom UHV (10-7 Torr) three-axis system for discrete part testing
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Custom high-vacuum (10-6 Torr) five-axis system for discrete part testing
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UHV (10-8 Torr) PlanarDL with 200 mm of XY travel
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Custom direct-drive UHV (10-7 Torr) XY system for e-beam inspection
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UHV (10-7 Torr) two-axis stage for scanning electron microscopy
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High-vacuum (10-6 Torr) six-axis ion-beam profiling system that includes a two-axis gimbal
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Custom high-vacuum (10-6 Torr) optics polishing system
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High-vacuum (10-6 Torr) six-axis ion-beam profiling system that includes a two-axis gimbal