<< 返回目录

ANT130-XY两轴纳米定位台
产品描述技术参数外形尺寸订货信息

Design Features

  • Integrated low-profile XY linear motor stage
  • Nanometer-level performance in a large travel format
  • High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm)
  • In-position stability of <1 nm
  • Anti-creep crossed-roller bearings
  • High dynamic performance with direct-drive technology
  • ULTRA accuracy grade option
  • Get details on our Order-to-Ship Program that could have this product shipped to you in two weeks

Introduction

The ANT130-XY series stages offer nanometer-level performance in XY travels up to 160 mm. The integrated, sleek design provides an extremely low profile of only 85 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system, and three accuracy grades.

Ultra-Precise Stage Design

The ANT130-XY design allows critical elements such as orthogonality, straightness, and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. All travel options (60 mm x 60 mm, 110 mm x 110 mm, 160 mm x 160 mm) come with the 85 mm profile height. The integrated cable management system is designed for long life and to minimize drag forces.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate, and high-speed positioning necessary for mass production of precision devices. ANT130-XY stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high speed, high resolution, and high accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion.

Multi-Axis Configurations

The ANT130-XY can be combined with other Aerotech ANT series products (vertical lift stages, direct-drive rotaries, and goniometers) to create unique, high performance, multi-axis systems.

ULTRA Accuracy Grade Option

In order to achieve the highest possible system accuracy from our multi-axis nanopositioning systems, Aerotech has developed an advanced, dynamic trajectory calibration system. To take advantage of this sophisticated calibration system, the mechanical system has to be completely assembled, functionally tested, and calibrated in our best-in-class metrology labs. Nanometer-level system accuracy can only be achieved under stringent environmental conditions, calibrating with the best test equipment, using the highest-precision mechanical elements, and utilizing the ULTRA software capabilities of Aerotech’s industry-leading controls. By implementing ULTRA dynamic trajectory calibration with the ANT130-XY, we are able to produce guaranteed two-dimensional accuracies of ±250 nm or better.

The plots provided in the specifications illustrate performance differences between a standard ANT130-XY and the ULTRA version. Straightness errors, orthogonality errors, and accuracy errors caused by stage yawing are virtually eliminated.

标准的或定制的,我们已经有了你。